The influence of the fluoride process of tungsten deposition parameters on the properties of tungsten self-composites obtained by chemical vapor infiltration
- Authors: Bukatin T.N.1, Karpenkov D.Y.1, Dushik V.V.2, Ten D.V.1
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Affiliations:
- The National University of Science and Technology MISIS
- Frumkin Institute of Physical Chemistry and Electrochemistry of the Russian Academy of Sciences
- Issue: Vol 88, No 5 (2024)
- Pages: 760-766
- Section: Physics of ferroelectrics
- URL: https://vietnamjournal.ru/0367-6765/article/view/654682
- DOI: https://doi.org/10.31857/S0367676524050112
- EDN: https://elibrary.ru/OWWIZF
- ID: 654682
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