Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
- 作者: Mochalov L.A.1, Kudryashov M.A.1, Prokhorov I.O.1, Vshivtsev M.A.1, Kudryashova Y.P.1, Slapovskaya E.A.1, Knyazev A.V.1
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隶属关系:
- Lobachevsky State University of Nizhny Novgorod (National Research University)
- 期: 卷 57, 编号 6 (2023)
- 页面: 478-484
- 栏目: PLASMA CHEMISTRY
- URL: https://vietnamjournal.ru/0023-1193/article/view/661467
- DOI: https://doi.org/10.31857/S0023119323060116
- EDN: https://elibrary.ru/RVETZB
- ID: 661467
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