Author Details

Воронина, Е. Н.

Issue	Section	Title	File
No 2 (2023)	Articles	Peculiarities of Interaction of Low-Energy Noble Gas Atoms with Methyl Groups on the Low-K-Surface
No 2 (2025)	Articles	Mechanisms of Methyl Group Elimination from Low-k Dielectric Surfaces by Plasma of Various Composition

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