On iron-doped diamond-like films produced in a hollow cathode discharge

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Abstract

The paper presents the results of measuring the current-voltage characteristics of iron-doped diamond-like films obtained by a combined method of physical sputtering of an iron cathode and plasma-chemical deposition in a hollow-cathode discharge. The nonlinear nature of the transverse conductivity of the film and a significant influence of the amplitude value of the sweep voltage on the amplitude value of the current and the shape of the current-voltage characteristic were shown.

About the authors

I. A. Sorokin

Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI

Author for correspondence.
Email: iasorokin@mail.ru
Russian Federation, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409

D. V. Kolodko

Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI

Email: iasorokin@mail.ru
Russian Federation, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409

References

  1. Сорокин И.А., Колодко Д.В., Краснобаев К.И. // РЭ. 2020. Т.65. №3. С.288.
  2. Sorokin I.A., Kolodko D.V. // Vacuum. 2023. V. 207. Article No. 111570.
  3. Vedeneev A. S., Luzanov V. A., Rylkov V. V. // Semiconductors. 2019. V. 53. № 14. P. 1970.
  4. Николаев С.Н., Веденеев А.С., Лузанов В.А. и др. // РЭ. 2021. Т. 66. № 10. С. 1024.

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