Author Details

Прохоров, И. О.

Issue	Section	Title	File
Vol 58, No 3 (2024)	PLASMA CHEMISTRY	Direct One-Stage Plasma Chemical Synthesis of Nanostructured Thin Films of the System β-Ga₂O₃-GaN of Different Composition
Vol 57, No 6 (2023)	PLASMA CHEMISTRY	Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
Vol 57, No 6 (2023)	PLASMA CHEMISTRY	Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates
Vol 57, No 5 (2023)	PLASMA CHEMISTRY	A Study on the Process of Plasma-Enhanced Chemical Vapor Deposition of (AlxGa1 – x)2O3 Thin Films